High throughput sub-10nm metallic particles organization on templates made by block copolymer self-assembly and nanoimprint
Arias-Zapata, Javier, Cordeiro, Julien, Böhme, Sophie, Girardot, Cécile, Garnier, Jérôme, Bézard, Philippe, Ntetsikas, Konstantinos, Liontos, George, Avgeropoulos, Apostolos, Peyrade, David, Zelsmann,Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.03.004
Date:
June, 2015
File:
PDF, 1.17 MB
english, 2015