Planar metal–insulator–metal diodes based on the Nb/Nb2O5/X...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 5

Planar metal–insulator–metal diodes based on the Nb/Nb2O5/X material system

Chin, Matthew L., Periasamy, Prakash, O'Regan, Terrance P., Amani, Matin, Tan, Cheng, O'Hayre, Ryan P., Berry, Joseph J., Osgood, Richard M., Parilla, Philip A., Ginley, David S., Dubey, Madan
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4818313
File:
PDF, 2.37 MB
english, 2013
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