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Liquid Injection Atomic Layer Deposition of Crystalline TiO[sub 2] Thin Films with a Smooth Morphology from Ti(O-i-Pr)[sub 2](DPM)[sub 2]
Kim, Seong Keun, Hoffmann-Eifert, Susanne, Mi, Shaobo, Waser, RainerVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3138722
File:
PDF, 648 KB
english, 2009