Hillocks on half-micron aluminum lines

Journal of Materials Research 1991 / 9 Vol. 6; Iss. 9

Hillocks on half-micron aluminum lines

Pico, Carey A., Bonifield, Tom D.
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Volume:
6
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1991.1817
Date:
September, 1991
File:
PDF, 2.75 MB
english, 1991
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