Performance comparison of wet-etched and dry-etched...

Physica status solidi 2013 / 11 Vol. 10; Iss. 11

Performance comparison of wet-etched and dry-etched Geiger-mode avalanche photodiodes using a single diffusion process

Lee, Kiwon, Yang, Kyounghoon
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Volume:
10
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300178
Date:
November, 2013
File:
PDF, 288 KB
english, 2013
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