Improving performance of the metal-to-metal contact RF MEMS...

Journal of Micromechanics and Microengineering 2011 / 06 Vol. 21; Iss. 6

Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design

Liu, Bo, Lv, Zhiqiu, He, Xunjun, Liu, Meng, Hao, Yilong, Li, Zhihong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/6/065038
Date:
June, 2011
File:
PDF, 1.72 MB
english, 2011
Conversion to is in progress
Conversion to is failed