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ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - Interface Analysis of MIM Capacitor Using ZrN Electrodes and ALD-ZrO
Choi, Jae Hyoung, Kim, Younsoo, Lim, Jae Soon, Park, Min Young, Chung, Suk-Jin, Kang, Sang Yeol, Cho, Kyuho, Yoo, Cha Young, Moon, Joo Tae, Lee, Hyung Ik, Kim, Ki Hong, Choi, Hye Ran, Chung, JaekwanYear:
2010
Language:
english
DOI:
10.1149/1.3481617
File:
PDF, 964 KB
english, 2010