Mechanical Properties of Thin and Thick Polysilicon Films...

Mechanical Properties of Thin and Thick Polysilicon Films for Microsystem Applications

Morante, J.R.
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Volume:
80-81
Year:
2001
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.405
File:
PDF, 851 KB
english, 2001
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