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Influence of Thermal Treatments on the Crystallisation of LPCVD-Deposited Si Thin Films
Bachrouri, A., Romano-Rodríguez, A., Alay, J.L., Vilà, A., Morante, J.R., Kotb, H., Rogel, R., Helen, Youri, Mohammed-Brahim, T., Sarret, M., Bonnaud, O.Volume:
80-81
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.80-81.199
File:
PDF, 485 KB
2001