Comparison of the Effects of Bias Voltage and Transverse Magnetic Field on the Macro-Particles Distribution on the Surface of TiN Films Prepared by Arc Ion Plating
Lang, Wen ChangVolume:
337
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.337.300
Date:
September, 2011
File:
PDF, 4.44 MB
english, 2011