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Influence of High Temperature in the Growth of Low Dislocation Content AlN Bridge Layers on Patterned 6H-SiC Substrates by Metalorganic Vapor Phase Epitaxy
Balakrishnan, Krishnan, Bandoh, Akria, Iwaya, Motoaki, Kamiyama, Satoshi, Amano, Hiroshi, Akasaki, IsamuVolume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L307
Date:
March, 2007
File:
PDF, 190 KB
english, 2007