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Coupled self-assembled monolayer for enhancement of Cu diffusion barrier and adhesion properties
Chung, Yongwon, Lee, Sanggeun, Mahata, Chandreswar, Seo, Jungmok, Lim, Seung-Min, Jeong, Min-su, Jung, Hanearl, Joo, Young-Chang, Park, Young-Bae, Kim, Hyungjun, Lee, TaeyoonVolume:
4
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C4RA08134J
Date:
November, 2014
File:
PDF, 3.42 MB
english, 2014