Possibilities of determining non-Maxwellian EEDFs from the OES line-ratios in low-pressure capacitive and inductive plasmas containing argon and krypton
Zhu, Xi-Ming, Pu, Yi-Kang, Celik, Yusuf, Siepa, Sarah, Schüngel, Edmund, Luggenhölscher, Dirk, Czarnetzki, UweVolume:
21
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/21/2/024003
Date:
April, 2012
File:
PDF, 890 KB
english, 2012