![](/img/cover-not-exists.png)
Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Transmission Microscopy
Wu, Xing, Uchikoshi, Junichi, Hirokane, Takaaki, Yamada, Ryuta, Takeuchi, Akihiro, Arima, Kenta, Morita, MizuhoVolume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2971178
File:
PDF, 560 KB
english, 2008