Amorphization-Crystallization of Semiconductors during Ion Implantation as a Non-Equilibrium Phase Transitions
Verner, Igor V., Gerasimenko, Nikolai N., Corbett, James W.Volume:
90
Year:
1992
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.90.170
File:
PDF, 1.00 MB
english, 1992