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On the assessment by grazing-incidence small-angle X-ray scattering of replica quality in polymer gratings fabricated by nanoimprint lithography
Soccio, M., Alayo, N., Martín-Fabiani, I., Rueda, D. R., García-Gutiérrez, M. C., Rebollar, E., Martínez-Tong, D. E., Pérez-Murano, F., Ezquerra, T. A.Volume:
47
Language:
english
Journal:
Journal of Applied Crystallography
DOI:
10.1107/S160057671400168X
Date:
April, 2014
File:
PDF, 1.04 MB
english, 2014