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Development of Barrier Anodic Oxide Al[sub 2]O[sub 3] Passivations of Aluminum Alloy Surface for LSI/FPD Plasma Process Equipment
Kawase, Yasuhiro, Kitano, Masafumi, Mizutani, Fumikazu, Saeki, Masayuki, Shirai, Yasuyuki, Ohmi, TadahiroVolume:
154
Year:
2007
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2755877
File:
PDF, 750 KB
english, 2007