Area-Selective Epitaxial Growth of GaAs on GaAs(111)A...

Area-Selective Epitaxial Growth of GaAs on GaAs(111)A Substrates by Migration-Enhanced Epitaxy

Uehara, Takahiro, Iwai, Takayuki, Yoshiba, Ippei, Horikoshi, Yoshiji
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.46.496
Date:
February, 2007
File:
PDF, 262 KB
english, 2007
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