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Maskless laser direct imaging lithography using a 355-nm UV light source in manufacturing of flexible fine dies
Ryoo, Kitaek, Kim, Minwook, Sung, Jinwoo, Kim, Kwangho, Kang, MyungchangVolume:
29
Language:
english
Journal:
Journal of Mechanical Science and Technology
DOI:
10.1007/s12206-014-1243-7
Date:
January, 2015
File:
PDF, 6.11 MB
english, 2015