Irradiation and Humidity Effects on the Leakage Current in...

Journal of The Electrochemical Society 2003 Vol. 150; Iss. 8

Irradiation and Humidity Effects on the Leakage Current in SiO[sub x](CH[sub 3])[sub y]-Based Intermetal Dielectric Films

Devine, R. A. B., Ball, D., Rowe, J. D., Tringe, J. W.
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Volume:
150
Year:
2003
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1586926
File:
PDF, 109 KB
english, 2003
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