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A Boost-Up Method of MEMS-Bulk-Micromachining towards C-MEMS Fabrication for Sensing and Manipulating Bioparticles
Malik, M. Rizwan, Shi, Tie Lin, Tang, Zi Rong, Haseeb, M.Volume:
316-317
Language:
english
Journal:
Defect and Diffusion Forum
DOI:
10.4028/www.scientific.net/DDF.316-317.59
Date:
May, 2011
File:
PDF, 871 KB
english, 2011