Experimental Evidence of Inversion-Layer Mobility Lowering in Ultrathin Gate Oxide Metal-Oxide-Semiconductor Field-Effect-Transistors with Direct Tunneling Current
Takagi, Shin-ichi, Takayanagi, MarikoVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.2348
Date:
April, 2002
File:
PDF, 159 KB
english, 2002