A Comparative Study on Si Activation in GaAs Between Laser...

Electrochemical and Solid-State Letters 2010 Vol. 13; Iss. 6

A Comparative Study on Si Activation in GaAs Between Laser Annealing and Rapid Thermal Annealing

Ong, C. Y., Pey, K. L., Ng, C. M., Ong, B. S., Wong, C. P., Shen, Z. X., Xing, Z. X., Wang, X. C., Zheng, H. Y., Chan, L.
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Volume:
13
Year:
2010
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.3376388
File:
PDF, 359 KB
english, 2010
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