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[IEEE 2014 Winter Simulation Conference - (WSC 2014) - Savanah, GA, USA (2014.12.7-2014.12.10)] Proceedings of the Winter Simulation Conference 2014 - A sampling decision system for semiconductor manufacturing - relying on virtual metrology and actual measurements
Kurz, Daniel, Pilz, Jurgen, Schirru, Andrea, Pampuri, Simone, De Luca, CristinaYear:
2014
Language:
english
DOI:
10.1109/wsc.2014.7020109
File:
PDF, 493 KB
english, 2014