A Systematic Approach of Understanding and Retaining Pmos...

MRS Proceedings 2006 / 1 Vol. 917

A Systematic Approach of Understanding and Retaining Pmos Compatible Work Function of Metal Electrodes On HfO2 Gate Dielectrics

Jha, Rashmi, Chung, Jiyoung, Chen, Bei, Nemanich, Robert, Misra, Veena
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Volume:
917
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0917-E04-05
Date:
January, 2006
File:
PDF, 125 KB
english, 2006
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