Si Whisker Growth by Hydrogen Radical using Hot Filament CVD Reactor
Nagayoshi, Hiroshi, Nishimura, Suzuka, Terashima, Kazutaka, Matsumoto, Nobuo, Ulyashin, Alexander G.Volume:
1018
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1018-EE05-30
Date:
January, 2007
File:
PDF, 458 KB
english, 2007