Capacitive-Piezoelectric Transducers for High- $Q$...

Journal of Microelectromechanical Systems 2015 / 4 Vol. 24; Iss. 2

Capacitive-Piezoelectric Transducers for High- $Q$ Micromechanical AlN Resonators

Hung, Li-Wen, Nguyen, Clark T.-C.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2332991
Date:
April, 2015
File:
PDF, 3.51 MB
english, 2015
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