Syntheses and structures of novel hafnium chloroamido...

Polyhedron 2010 Vol. 29; Iss. 12

Syntheses and structures of novel hafnium chloroamido mono-amidinate and mono-guanidinate as precursors for HfO2 thin film

Mohamad Eleter, L.G. Hubert-Pfalzgraf, Stéphane Daniele, Guillaume Pilet, Bernand Tinant
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Volume:
29
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.poly.2010.05.023
File:
PDF, 373 KB
english, 2010
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