[ECS 208th ECS Meeting - Los Angeles, California (October 16-October 21, 2005)] ECS Transactions - Electrografting, A Unique Wet Technology for Seed and Direct Plating in Copper Metallization
Gonzalez, Jose, Raynal, Frédéric, Monchoix, Hervé, Ben Hamida, Abdeslem, Daviot, Jerome, Rabinzohn, Patrick, Bureau, ChristopheVolume:
1
Year:
2006
Language:
english
DOI:
10.1149/1.2218487
File:
PDF, 756 KB
english, 2006