Structural and Electrical Characterization of Ion Beam...

Materials Science Forum 2001 Vol. 353-356

Structural and Electrical Characterization of Ion Beam Synthesized and n-Doped SiC Layers

Serre, C., Panknin, D., Pérez-Rodríguez, A., Romano-Rodríguez, A., Morante, J.R., Kögler, R., Skorupa, Wolfgang, Esteve, Jaume, Acero, M.C.
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Volume:
353-356
Year:
2001
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.353-356.591
File:
PDF, 346 KB
2001
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