![](/img/cover-not-exists.png)
Biaxially Aligned Yttria Stabilized Zirconia and Titanium Nitride Layers Deposited by Unbalanced Magnetron Sputtering
Mahieu, Stijn, Ghekiere, Pieter, De Winter, Griet, De Gryse, Roger, Depla, Diederik, Lebedev, Oleg I.Volume:
105
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.105.447
File:
PDF, 469 KB
english, 2005