Mechanical and chemical investigation of the interface...

Thin Solid Films 2015 / 05 Vol. 583

Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

Völker, B., Heinz, W., Matoy, K., Roth, R., Batke, J.M., Schöberl, T., Cordill, M.J., Dehm, G.
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Volume:
583
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.03.047
Date:
May, 2015
File:
PDF, 821 KB
english, 2015
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