Investigation of Cu/TaN Metal Gate for Metal-Oxide-Silicon Devices [Journal of The Electrochemical Society, 150, G22 (2003)]
Tsui, Bing-Yue, Huang, Chih-FengVolume:
150
Year:
2003
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1566966
File:
PDF, 29 KB
2003