Stability of TiN Films Prepared by Chemical Vapor...

Stability of TiN Films Prepared by Chemical Vapor Deposition Using Tetrakis-dimethylamino Titanium

Kim, Do-Heyoung
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Volume:
143
Year:
1996
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1837081
File:
PDF, 276 KB
english, 1996
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