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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V - A MEMS sensor for the measurement of density-viscosity for oilfield applications
Harrison, Christopher, Ryu, Seungoh, Goodwin, Anthony, Hsu, Kai, Donzier, Eric, Marty, Frederic, Mercier, Bruno, Tanner, Danelle M., Ramesham, RajeshuniVolume:
6111
Year:
2006
Language:
english
DOI:
10.1117/12.645080
File:
PDF, 605 KB
english, 2006