Oxygen and Copper Precipitation at the Silicon/Silicon...

Solid State Phenomena 1993 Vol. 32-33

Oxygen and Copper Precipitation at the Silicon/Silicon Dioxide Interface

Correia, A., Maurice, J.L., Boutry-Forveille, A., Ballutaud, D.
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Volume:
32-33
Year:
1993
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.32-33.191
File:
PDF, 532 KB
1993
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