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Positronium Annihilation Lifetime Spectroscopy of Porous Low-k Films with Periodic Pore Structures
Ohdaira, Toshiyuki, Suzuki, Ryoichi, Shirataki, Hironobu, Matsuno, Shin-YaVolume:
445-446
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.445-446.334
File:
PDF, 315 KB
english, 2004