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Variable Optimization for Chemical Mechanical Polishing
Liao, Shan-Hui, Fu, Ming-Nan, Hou, Kung-Hsu, Li, Ching-ChungVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.2961
Date:
May, 2005
File:
PDF, 290 KB
english, 2005