Surface Loss Probability of Nitrogen Atom on Stainless-Steel in N 2 Plasma Afterglow
Takashima, Seigo, Takeda, Keigo, Kato, Satoshi, Hiramatsu, Mineo, Hori, MasaruVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.076101
Date:
July, 2010
File:
PDF, 280 KB
english, 2010