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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Design and Development of ALD Precursors for Microelectronics
Kanjolia, Ravi K., Anthis, J., Odedra, R., Williams, P., Heys, P. N.Volume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2979983
File:
PDF, 338 KB
english, 2008