Structural characterization of Ti implanted AlN

Journal of Materials Research 1995 / 12 Vol. 10; Iss. 12

Structural characterization of Ti implanted AlN

Borowski, M., Traverse, A., Dallas, J.P.
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Volume:
10
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1995.3136
Date:
December, 1995
File:
PDF, 693 KB
english, 1995
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