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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Etching Deep Macropores in n-Type Silicon in Short Times
Ossei-Wusu, Emmanuel, Cojocaru, Ala, Carstensen, Jürgen, Leisner, Malte, Föll, HelmutVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982548
File:
PDF, 622 KB
english, 2008