Demonstration of Modification from AlF3 Re-Deposition to Polymer Re-Deposition on Air Bearing Surface (ABS) Etched Sidewall of Fluorine-Based Plasma Etch on Al2O3-TiC Substrate
Pakpum, Chupong, Siangchaew, Krisda, Limsuwan, PichetVolume:
213
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.213.93
Date:
February, 2011
File:
PDF, 754 KB
english, 2011