An Investigation of Structure and Wear Properties of...

Key Engineering Materials 2008 Vol. 368-372

An Investigation of Structure and Wear Properties of TiN/NbN Films Deposited by Reactive Magnetron Sputtering

Liu, Chien Cheng, Weng, Ming Hang, Wang, Chien Tang, Chen, Jheng Hong, Chou, Yung Chih, Yaw, Huai Wei
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Volume:
368-372
Year:
2008
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.368-372.1310
File:
PDF, 3.24 MB
english, 2008
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