Gettering Effect with Al Implanted into 4H-SiC CVD...

Materials Science Forum 2003 Vol. 433-436

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

Kalinina, Evgenia V., Kholuyanov, G., Sitnikova, A.A., Kossov, V., Yafaev, R., Pensl, Gerhard, Reshanov, Sergey A., Konstantinov, Andrey O., Hallén, Anders
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.637
File:
PDF, 1.61 MB
english, 2003
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