![](/img/cover-not-exists.png)
Effect of ambient combinations of argon, oxygen, and hydrogen on the properties of DC magnetron sputtered indium tin oxide films
Marikkannan, M., Subramanian, M., Mayandi, J., Tanemura, M., Vishnukanthan, V., Pearce, J. M.Volume:
5
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4906566
Date:
January, 2015
File:
PDF, 4.59 MB
english, 2015