SiC on SOI Resonators: A Route for Electrically Driven MEMS...

Materials Science Forum 2010 / 4 Vol. 645-648

SiC on SOI Resonators: A Route for Electrically Driven MEMS in Harsh Environment

Placidi, Marcel, Pérez-Tomás, Amador, Godignon, Phillippe, Mestres, Narcis, Abadal, Gabriel, Chassagne, Thierry, Zielinski, Marcin
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.845
Date:
April, 2010
File:
PDF, 360 KB
english, 2010
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