Defect Structure of Multicrystalline Chemical Vapor...

Solid State Phenomena 1994 Vol. 37-38

Defect Structure of Multicrystalline Chemical Vapor Deposited Silicon Films

Voigt, A., Rillich, B., Strunk, Horst P.
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Volume:
37-38
Year:
1994
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.37-38.381
File:
PDF, 818 KB
1994
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