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The depth distribution of residual stresses in (Ti,Al)N films: Measurement and analysis
Zhao, Sheng-Sheng, Du, Hao, Hua, Wei-Gang, Gong, Jun, Li, Jia-Bao, Sun, ChaoVolume:
22
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.2007.0363
Date:
October, 2007
File:
PDF, 415 KB
english, 2007