Comparing membrane- and cantilever-based surface stress...

Sensors and Actuators A: Physical 2015 / 06 Vol. 228

Comparing membrane- and cantilever-based surface stress sensors for reproducibility

Loizeau, Frédéric, Akiyama, Terunobu, Gautsch, Sebastian, Vettiger, Peter, Yoshikawa, Genki, de Rooij, Nico F.
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Volume:
228
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.02.039
Date:
June, 2015
File:
PDF, 2.44 MB
english, 2015
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